Phosphoric Acid 85% Electronic/Cleanroom Grade

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Phosphoric Acid, Electronic/Cleanroom Grade, 85% is the aqueous solution of 85% pure Phosphoric Acid that appears as a colorless syrupy liquid at room temperature. It is specially produced for the electronic industry to perform cleaning of silicon wafers and etching of semiconductors, as these delicate applications require ultra-purified solvents. Lab Alley’s premium quality Phosphoric Acid, Electronic/Cleanroom Grade, 85% has metallic concentrations in parts per billions or trillions and is suitable for cleaning and etching in semiconductors or other electronic applications.


Phosphoric Acid, Electronic/Cleanroom Grade, 85% Features:

Assay (H3PO4), % 85.00 – 87.00
Insoluble Matter, ppb Max 20,000
Color, APHA Max 7
Volatile Acids, ueq/g Max 0.160
Heavy Metals, ppb Max 5,000
Chloride (Cl), ppb Max 600
Nitrate (NO3), ppb Max 1200
Sulfate (SO4), ppm Max 7000
Aluminum (Al), ppb Max 100
Arsenic and Antimony (as As), ppb Max 50
Barium (Ba), ppb Max 1000
Calcium (Ca), ppb Max 50
Chromium (Cr), ppb Max 50
Cobalt (Co), ppb Max 50
Copper (Cu), ppb Max 50
Iron (Fe), ppb Max 50
Lead (Pb), ppb Max 50
Lithium (Li), ppb Max 50
Magnesium (Mg), ppb Max 50
Manganese (Mn), ppb Max 50
Nickel (Ni), ppb Max 50
Potassium (K), ppb Max 60
Sodium (Na), ppb Max 60
Strontium (Sr), ppb Max 20
Titanium (Ti), ppb Max 100
Zinc (Zn), ppb Max 100
Particle Count, 0.5 um, ct/ml Max 50
Particle Count, 1.0 um, ct/ml Max 10
Commercial/Industrial Applications
  • Electronic industry
  • Anti-rust agent
  • Cleaning agent
Safety and Handling

Phosphoric Acid, Electronic/Cleanroom Grade, 85% Shipping Information:
DOT: Phosphoric Acid, 8, UN1805, PG III

Important: Currently, this item will only be shipped to commercial addresses. This item will be deleted from orders requesting delivery to residential addresses. 

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