Chemistry Table
7664-38-2 | |
H3PO4 | |
97.995 | |
1805 | |
Phosphoric acid | |
Grade | Semiconductor/Electronic Grade |
Specifications
Assay (H3PO4), % | 85.00 – 87.00 |
Insoluble Matter, ppb | Max 20,000 |
Color, APHA | Max 7 |
Volatile Acids, ueq/g | Max 0.160 |
Heavy Metals, ppb | Max 5,000 |
Chloride (Cl), ppb | Max 600 |
Nitrate (NO3), ppb | Max 1200 |
Sulfate (SO4), ppm | Max 7000 |
Aluminum (Al), ppb | Max 100 |
Arsenic and Antimony (as As), ppb | Max 50 |
Barium (Ba), ppb | Max 1000 |
Calcium (Ca), ppb | Max 50 |
Chromium (Cr), ppb | Max 50 |
Cobalt (Co), ppb | Max 50 |
Copper (Cu), ppb | Max 50 |
Iron (Fe), ppb | Max 50 |
Lead (Pb), ppb | Max 50 |
Lithium (Li), ppb | Max 50 |
Magnesium (Mg), ppb | Max 50 |
Manganese (Mn), ppb | Max 50 |
Nickel (Ni), ppb | Max 50 |
Potassium (K), ppb | Max 60 |
Sodium (Na), ppb | Max 60 |
Strontium (Sr), ppb | Max 20 |
Titanium (Ti), ppb | Max 100 |
Zinc (Zn), ppb | Max 100 |
Particle Count, 0.5 um, ct/ml | Max 50 |
Particle Count, 1.0 um, ct/ml | Max 10 |
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